Spectroscopic ellipsometry : principles and applications

dc.date.accessioned	2020-03-18T21:11:59Z
dc.date.available	2020-03-18T21:11:59Z
dc.date.issued	2007
dc.identifier.isbn	978-0-470-01608-4
dc.identifier.uri	http://hdl.handle.net/123456789/14543
dc.description.abstract	Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields	es
dc.language.iso	es	es
dc.publisher	John Wiley	es
dc.rights	Este documento es reproducido por la biblioteca universitaria de la UCLV bajo el amparo de la legislación cubana vigente sobre derecho de autor. Los usuarios podrán utilizar este material bajo la siguiente licencia: Reconociendo a los autores de la obra mediante las citas y referencias bibliográficas correspondientes, utilizar solo para fines No Comerciales y No realizar reproducciones u obras derivadas.	es
dc.subject	Elipsometría	es
dc.subject	Análisis Espectral	es
dc.subject	Materiales	es
dc.subject	Propiedades Ópticas.	es
dc.subject	Ellipsometry	es
dc.subject	Spectrum Analysis	es
dc.subject	Materials	es
dc.subject	Optical Properties	es
dc.title	Spectroscopic ellipsometry : principles and applications	es
dc.type	Book	es